Author(s)

FeiTong Luo

Affiliation(s)

Shenzhen Office, Heidelberg Instruments, Shenzhen 518000, Guangdong, China.

Corresponding Author

FeiTong Luo

ABSTRACT

The laser direct writing lithography machine is a key equipment for integrated circuits and semiconductor manufacturing. And it is a complex and highly precise device consisting of an optical system, mechanical system, electronic system, and computer system. The maintenance and management of the lithography machine directly affect the quality and stability of the lithography products, and ultimately influence the work efficiency of users and the competitiveness of enterprises. In response to the above issues, this paper proposes management and maintenance measures for laser direct writing lithography machines and related equipment, which is helpful to improve the usage and maintenance capabilities of users and manufacturers, reduce equipment operation costs, and provide useful references for the maintenance and management of precision equipment.

KEYWORDS

Laser direct writing; Lithography machine; Machine maintenance; Management measure

CITE THIS PAPER

FeiTong Luo. Maintenance and management of laser direct writing lithography machine. Journal of Manufacturing Science and Mechanical Engineering. 2025, 3(1): 28-32. DOI: https://doi.org/10.61784/msme3017.

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